Linear tunnel magnetoresistive sensor including an integrated back-bias magnet
AssigneeInfineon Technologies AG
InventorsSimon Hainz, Matthias Pohl
Life of this patent
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Abstract
A sensor module may include a back-bias magnet with a magnetization in a first direction. The sensor module may include a sensor chip including a first set of tunnel magnetoresistive (TMR) sensing elements. The sensor chip may be configured to determine a characteristic of a first magnetic field component using the first set of TMR sensing elements, and to generate a sensor signal based at least in part on the characteristic of the first magnetic field component. A value of the sensor signal may correspond to a linear position of a ferromagnetic object.
Claims20
A sensor module, comprising:
- a back-bias magnet with a magnetization in a first direction and configured to produce a magnetic field based on the magnetization, wherein the back-bias magnet has a magnet surface;
- a sensor chip having a chip surface mounted to the magnet surface, wherein the chip surface defines a chip plane having a first dimension parallel to the first direction and a second dimension parallel to a second direction that is perpendicular to the first direction,
- wherein the sensor chip includes a first set of tunnel magnetoresistive (TMR) sensing elements that are sensitive to an in-plane component of the magnetic field that is parallel to the first direction or parallel to the second direction, and
- wherein the sensor chip is configured to:
- determine a characteristic of a first magnetic field component of the magnetic field using the first set of TMR sensing elements;
- and
- generate a sensor signal based, at least in part, on the characteristic of the first magnetic field component, wherein a value of the sensor signal corresponds to a linear position of a ferromagnetic object along the second direction, wherein the linear position of the ferromagnetic object is configured to change along the second direction relative to the sensor module.
A method, comprising:
- determining, by a sensor chip, a characteristic of a first magnetic field component of a magnetic field using a first set of tunnel magnetoresistive (TMR) sensing elements;
- and
- generating, by the sensor chip, a sensor signal based at least in part on the characteristic of the first magnetic field component, wherein a value of the sensor signal corresponds to a linear position of a ferromagnetic object along a second direction,
- wherein the first set of TMR sensing elements is sensitive in a first direction that is parallel to a direction of magnetization of a back-bias magnet, and
- wherein the sensor chip has a chip surface mounted to a magnet surface of the magnet, wherein the chip surface defines a chip plane having a first dimension parallel to the first direction and a second dimension parallel to the second direction that is perpendicular to the first direction.
Dependencies are inferred from the claim text.