Cooling flow in substrate processing according to predicted cooling parameters

A system, comprising:

• a processing chamber configured to process a substrate, the processing chamber comprising a cooling loop configured to flow coolant to cool at least a portion of the processing chamber;
• a processing device configured to:
• receive first data indicative of a process recipe for processing the substrate in the processing chamber;
• input the first data into a model, wherein the model comprises a digital twin configured to represent thermal characteristics of the processing chamber;
• receive, via the model, a predicted value of a parameter associated with a flow of coolant through the cooling loop of the processing chamber;
• and
• during execution of the process recipe in the processing chamber, cause coolant to flow through the cooling loop based on the predicted value of the parameter.

A non-transitory machine-readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to:

• receive first data indicative of a process recipe for processing a substrate in a processing chamber of a substrate processing system;
• input the first data into a trained machine learning model;
• receive, via the trained machine learning model, a predicted value of a parameter associated with a flow of coolant through a cooling loop of the processing chamber;
• and
• during execution of the process recipe in the processing chamber, cause coolant to flow through the cooling loop based on the predicted value of the parameter.