Method and system for depositing thin film on substrate
AssigneeImam Mohammad Ibn Saud Islamic University
InventorMohamed Abdel Rafea Ibrahim Konsow
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AssigneeImam Mohammad Ibn Saud Islamic University
InventorMohamed Abdel Rafea Ibrahim Konsow
Estimating the term…
A method and a system for depositing a thin film with a thickness under 10 μm. The method includes submerging a substrate in a precursor liquid in a deposition vessel having an inlet pipe and outlet pipe and a substrate holder that suspends the substrate inside the deposition vessel at an immersion depth. The outlet pipe is situated at a first height lower than the immersion depth, while the inlet pipe is connected above it, allowing for controlled filling and draining, managed by a drain valve. The excess precursor liquid is discharged from the substrate by gravity to a collection vessel, creating a uniform layer. This layer is then dried in a drying chamber, after which one side of the substrate is cleared to leave a single film which is then heated providing thin film formation.
A method for depositing a plurality of thin films, each having a film thickness less than 10 μm, on a substrate having a first side and a second side, the method comprising:
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