Method and apparatus for fabricating high aspect ratio structures
AssigneeIndian Institute of Technology Bombay
InventorsPrasanna Subhash Gandhi, Makrand Ashok Rakshe, Tanveer ul Islam
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AssigneeIndian Institute of Technology Bombay
InventorsPrasanna Subhash Gandhi, Makrand Ashok Rakshe, Tanveer ul Islam
Estimating the term…
Embodiments herein disclose a method for fabricating high aspect ratio structures. The method includes depositing a predefined quantity of a viscoelastic fluid on a top surface of a bottom cell plate and compressing the viscoelastic fluid deposited on the top surface of the bottom cell plate using a bottom surface of a top cell plate. The viscoelastic fluid is a blend of a solvent and a polymer. At least one of the top cell plate and bottom cell plate comprises a plurality of lands, sealed source holes and/or unsealed source hole for penetration of a low-viscous fluid. Further, the method includes separating the top cell plate and the bottom cell plate to induce out of plane stretching of the high viscous fluid and obtaining a plurality of high aspect ratio structures between the top cell plate and the bottom cell plate due to the penetration of the low-viscous fluid.
A method for fabricating high aspect ratio structures, the method comprising:
An apparatus for fabrication of high aspect ratio structures, the apparatus comprising:
Dependencies are inferred from the claim text.