Grinding method of workpiece

A workpiece grinding method in which a workpiece is thinned to a finished thickness by using a grinding apparatus including a holding table that holds the workpiece, a grinding unit having a spindle on which a grinding wheel, on which grinding abrasive stones that grind the workpiece held by the holding table are annularly disposed, is mounted and a motor that rotationally drives the spindle, a grinding feed unit that causes the grinding unit to get further away and closer to the holding table, a grinding water supply unit that supplies grinding water to an upper surface of the workpiece held by the holding table in such a manner that a flow rate is adjustable, and a control unit that controls each of the units, the grinding method comprising:

• a first grinding step of executing grinding feed of the grinding unit at a first grinding feed rate and grinding the workpiece to a predetermined thickness while supplying the grinding water with a first constant grinding water amount that allows suppression of wear of the grinding abrasive stones;
• and
• a second grinding step of, upon reaching the predetermined thickness of the workpiece in the first grinding step, changing the grinding feed of the grinding unit to a second grinding feed rate lower than the first grinding feed rate, changing the supply of the grinding water to a second constant grinding water amount reduced relative to the first grinding water amount, and grinding the workpiece to the finished thickness while supplying the grinding water at the second constant grinding water amount,
• wherein the second grinding step increases wear and promotes self-sharpening of the grinding abrasive stones.