Superstrate including a body and layers and methods of forming and using the same

A method of making a first superstrate, comprising:

• forming a first buffer layer along a surface of an upper surface of a body of the first superstrate, wherein the upper surface does not have recessions and protrusions, the first buffer layer has a proximal surface and a distal surface opposite the proximal surface, and the body is closer to the proximal surface of the first buffer layer than to the distal surface of first buffer layer;
• and
• forming a second compensation layer along the distal surface of the first buffer layer to fill any elevation changes along the distal surface thereof, wherein the second compensation layer has a proximal surface and a distal surface opposite the proximal surface, and the body is closer to the proximal surface of the second compensation layer than to the distal surface of second compensation layer;
• and
• forming a third protection layer along the distal surface of the second compensation layer, wherein the third protection layer has a proximal surface and a distal surface opposite the proximal surface, and the body is closer to the proximal surface of the third protection layer than to the distal surface of third protection layer,
• wherein after forming the third protection layer, an Ra of the distal surface of the first buffer layer is greater than an Ra of each of the upper surface of the body, the distal surface of the second compensation layer, and the distal surface of the third protection layer, wherein the Ra is an arithmetic average surface roughness.