Photoelectric fluid field cluster catalytic method for atomic-scale deterministic processing

A photoelectric fluid field cluster catalytic method for atomic-scale deterministic processing, comprising the following steps:

• S1, selecting nanoparticles with photocatalytic activity as a photocatalytic medium, and using a photoreduction method to realize a precipitation of metal nanoparticles on a surface of the photocatalytic medium, thus creating photoelectrocatalytic clusters;
• S2, mixing the photoelectrocatalytic clusters with deionized water to prepare a polishing solution;
• S3, illuminating a coupling area between a surface to be processed of a workpiece, the photoelectrocatalytic clusters and a flexible tool with a catalytic light source, and simultaneously applying a bias voltage to a conductive tray of the workpiece to control a potential of the workpiece and form a spatial electric field between the photoelectrocatalytic clusters and the workpiece;
• and
• S4, applying a load to a flexible tool head and setting a rotation speed to generate a hydrodynamic pressure that maintains a gap between the tool head and the workpiece surface, and driving the polishing solution in the gap to flow through a flow field, thus enabling controllable removal with atomic-level precision under an interfacial synergistic photoelectrocatalytic effect.