Fine particle manufacturing apparatus and fine particle manufacturing method

A fine particle manufacturing method using a thermal plasma flame generated inside a plasma torch,

• there being provided a first coil surrounding a periphery of the plasma torch, a second coil disposed under the first coil and surrounding the periphery of the plasma torch, a first power source section supplying unmodulated high frequency current that is not subjected to amplitude modulation to the first coil, and a second power source section supplying amplitude-modulated high frequency current to the second coil, the first coil and the second coil being arranged side by side in a longitudinal direction of the plasma torch, and the thermal plasma flame being generated by the first power source section and the second power source section,
• the method comprising:
• a first step of supplying feedstock for fine particle manufacturing to the thermal plasma flame generated inside the plasma torch;
• and
• a second step of evaporating the feedstock by use of the thermal plasma flame to transform the feedstock into a mixture in a gas phase state and cooling the mixture,
• wherein in the first step and the second step, the first power source section supplies unmodulated high frequency current that is not subjected to amplitude modulation to the first coil and the second power source section supplies amplitude-modulated high frequency current to the second coil.