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US 12,323,131 B2Granted
Spring-mass microelectromechanical resonator
AssigneeKYOCERA Technologies Oy
InventorsVille Saarela, Antti Jaakkola, Aarne Oja
Life of this patent
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Abstract
A microelectromechanical (MEMS) resonator includes a spring-mass system having a first weight portion (M1), a second weight portion (M2), and a central spring portion (SP) in between the weight portions. The weight portions are connected (or mechanically attached) to the central spring portion and thus improving stability.
Claims32
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion, and
- a central spring portion in between the first and second weight portions, the microelectromechanical resonator having a layer piezoelectric to actuate the microelectromechanical resonator,
- wherein the microelectromechanical resonator further comprises:
- a body of silicon doped to an average impurity concentration of at least 2*1019 cm3,
- wherein material portions of the central spring portion are oriented along an x-axis perpendicular to an y-axis in which direction the microelectromechanical resonator is configured to vibrate, and
- wherein the x-axis runs along a <100> silicon crystal direction or deviates less than 5 degrees from that direction.
5 more elements
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion, and
- a central spring portion in between the weight portions, the microelectromechanical resonator having a piezoelectric layer to actuate the microelectromechanical resonator,
- wherein the central spring portion comprises a meandering structure attached at a first end to the first weight portion and at an opposite end to the second weight portion.
2 more elements
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion, and
- a central spring portion in between the weight portions, the microelectromechanical resonator having a piezoelectric layer to actuate the microelectromechanical resonator,
- wherein the first weight portion and the second weight portion are connected to the central spring portion at edges of the first weight portion and the second weight portion.
2 more elements
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion,
- a central spring portion in between the weight portions, the microelectromechanical resonator having a piezoelectric layer to actuate the microelectromechanical resonator, and
- anchoring points in the middle of a first edge and in the middle of an opposite edge of the spring portion in a direction of the microelectromechanical resonator in which the microelectromechanical resonator vibrates.
2 more elements
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion,
- a central spring portion in between the weight portions, the microelectromechanical resonator having a piezoelectric layer to actuate the microelectromechanical resonator, and
- anchoring points aligned with a center of mass of the central spring portion or of the spring-mass system.
2 more elements
A microelectromechanical resonator, comprising:
- a spring-mass system having
- a first weight portion,
- a second weight portion,
- a central spring portion in between the weight portions, the microelectromechanical resonator having a piezoelectric layer to actuate the microelectromechanical resonator, and
- anchoring point to anchor the central spring portion to surroundings, a main resonance mode shape of the microelectromechanical resonator having a nodal point at the anchoring point.
2 more elements
Dependencies are inferred from the claim text.