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US 12,323,127 B2Granted
Composite substrate, elastic wave element, and production method for composite substrate
AssigneeNGK Insulators, Ltd.
InventorsYuji Hori, Takahiro Yamadera
Life of this patent
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Abstract
A composite substrate includes a supporting substrate composed of quartz, a piezoelectric material substrate, a first amorphous layer present between the supporting substrate and piezoelectric material substrate, and a second amorphous layer present between the supporting substrate and first amorphous layer. The first amorphous layer contains 10 to 30 atom % of silicon atoms, and the second amorphous layer contains 1 to 10 atom % of fluorine atoms.
Claims5
A composite substrate comprising:
- a supporting substrate comprising quartz;
- a piezoelectric material substrate;
- a first amorphous layer present between said supporting substrate and said piezoelectric material substrate;
- and
- a second amorphous layer present between said supporting substrate and said first amorphous layer,
- wherein said first amorphous layer contains 10 to 30 atom % of silicon atoms, and
- wherein said second amorphous layer contains 1 to 10 atom % of fluorine atoms.
4 more elements
Dependencies are inferred from the claim text.