US 12,321,106 B2 · Device for detecting a temperature, installation for producing an optical element and method for producing an optical element

Abstract

A device (20) for detecting a temperature on a surface (15) of an optical element (14) for semiconductor lithography. The device includes an optical element (14) having a face (16) irradiated with electromagnetic radiation (7, 8, 43), a temperature recording device (21), and a temperature controlled element (22) configured to be temperature-controlled and arranged so that the predominant proportion of the intensity of the thermal radiation (25.2) detected by the temperature recording device and reflected by reflection at the surface of the optical element is emitted by the temperature-controlled element. Also disclosed are an installation (1) for producing a surface (15) of an optical element (14) for semiconductor lithography and a method for producing a surface (15) of an optical element (14) of a projection exposure apparatus (30), wherein the surface is temperature-controlled and the surface temperature is detected during the temperature control.

Claims30

Dependent claims

A device for detecting a temperature on a surface of an optical element for semiconductor lithography, comprising:

an optical element having a surface arranged to be irradiated with electromagnetic radiation along a first path,
a temperature recording device configured to detect thermal radiation emitted from the optical element and thermal radiation reflected from the optical element along a second path different from the first path, and
a temperature-controlled element emitting the thermal radiation along the second path and configured to be temperature-controlled, wherein the temperature-controlled element is controlled to be at a temperature lower than a temperature of the surface,
wherein the second path is arranged such that, of all of the thermal radiation detected by the temperature recording device, at least a predominant proportion of thermal radiation reflected at the surface of the optical element is the thermal radiation emitted by the temperature-controlled element.

1 more element

Dependencies are inferred from the claim text.

Device for detecting a temperature, installation for producing an optical element and method for producing an optical element

Life of this patent

Device for detecting a temperature, installation for producing an optical element and method for producing an optical element

Life of this patent

Abstract

Claims30