MEMS environmental sensor and preparation method therefor

A MEMS environmental sensor, comprising a transfer substrate, a transfer medium, a load bearing substrate, and at least one magnetic sensing element;

• wherein a transfer cavity is provided inside the transfer substrate, the transfer cavity penetrates the transfer substrate, and the transfer medium is located inside the transfer cavity;
• the transfer cavity comprises at least one input port and at least one output port, and a surface area of the input port is larger than a surface area of the output port;
• an elastic transfer membrane is provided on the surface of the input port, and an elastic pressure membrane is provided on the surface of the output port;
• a load bearing cavity is provided in the load bearing substrate, the load bearing cavity penetrates the load bearing substrate, and the magnetic sensing element is at least positioned inside the load bearing cavity;
• and the load bearing cavity is located at one side of the elastic pressure membrane that is away from the transfer cavity, and a perpendicular projection of the load bearing cavity on a plane where the elastic pressure membrane is located at least partially overlaps with a perpendicular projection of the output port on the plane where the elastic pressure membrane is located,
• wherein
• a rigid covering layer is provided on a surface of one side of the elastic transfer membrane away from the transfer cavity;
• or
• a vacuum hood is provided on one side of the elastic transfer membrane away from the transfer cavity, the vacuum hood and the elastic transfer membrane form a sealed cavity, and the sealed cavity is a vacuum sealed cavity or a sealed cavity with a known reference pressure, and a mass block is provided inside the sealed cavity, and the mass block is provided on the surface of the elastic transfer membrane;
• alternatively, the sealed cavity is filled with a counterweight liquid.