Systems and methods for providing getters in microelectromechanical systems
AssigneeInvenSense, Inc.
InventorsDaesung Lee, Jeff Chunchieh Huang, Jongwoo Shin, Bongsang Kim, Logeeswaran Veerayah Jayaraman
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Abstract
Systems and methods are provided that provide a getter in a micromechanical system. In some embodiments, a microelectromechanical system (MEMS) is bonded to a substrate. The MEMS and the substrate have a first cavity and a second cavity therebetween. A first getter is provided on the substrate in the first cavity and integrated with an electrode. A second getter is provided in the first cavity over a passivation layer on the substrate. In some embodiments, the first cavity is a gyroscope cavity, and the second cavity is an accelerometer cavity.
Claims14
A device, comprising:
- a cavity formed between a microelectromechanical system (MEMS) device layer and a semiconductor layer;
- and
- a getter layer is disposed over a metal layer and the metal layer is disposed over the semiconductor layer,
- wherein a first vertical portion of the sidewall of the metal layer is surrounded by a passivation layer, and wherein a second vertical portion of the sidewall of the metal layer and the getter layer are disposed in the cavity.
A device, comprising:
- a microelectromechanical system (MEMS) layer comprising a handle layer and a device layer, the MEMS layer bonded to a second layer, the MEMS layer and the second layer having a cavity therebetween;
- and
- a getter layer is disposed over a metal layer and the metal layer is disposed over the second layer, wherein a first vertical portion of the sidewall of the metal layer is surrounded by a passivation layer, and wherein a second vertical portion of the sidewall of the metal layer and the getter layer are disposed in the cavity.
Dependencies are inferred from the claim text.