Transport system in fabrication facility
AssigneeSemes Co., Ltd.
InventorSang Pyo Jun
Life of this patent
Estimating the term…
Abstract
A transport system in a fabrication facility includes a driving unit moving along a driving rail, and a steering unit selectively contacting a steering guide rail at a branching part where the driving rail branches off. The steering unit includes horizontal steering wheels contacting a vertical guide part of the steering guide rail, and vertical steering wheels contacting a horizontal guide part of the steering guide rail.
Claims17
A transport vehicle configured to transport in a transport system in a fabrication facility, the transport vehicle comprising:
- a driving unit configured to move along a driving rail;
- and
- a steering unit configured to selectively contact a steering guide rail at a branching part where the driving rail branches off,
- wherein the steering unit comprises:
- a plurality of horizontal steering wheels configured to:
- rotate around a first axis extending in a vertical direction;
- and
- selectively contact a vertical guide part of the steering guide rail;
- and
- a plurality of vertical steering wheels configured to:
- rotate around a second axis extending in a horizontal direction;
- and
- selectively contact a horizontal guide part of the steering guide rail,
- wherein the horizontal guide part and the vertical guide part are physically separated from each other,
- wherein the steering unit further comprises:
- a movable body configured to move in a direction perpendicular to a moving direction of the transport vehicle;
- a horizontal body coupled to the movable body;
- and
- a vertical body coupled to a top part of the horizontal body,
- wherein the vertical body includes an opening in which the plurality of horizontal steering wheels are disposed,
- wherein the opening horizontally penetrates the vertical body the vertical body, and
- wherein the vertical body vertically overlaps the plurality of horizontal steering wheels.
A rail for a movement of a transport vehicle in a transport system in a fabrication facility, the rail comprising:
- a driving rail configured to provide a path for the transport vehicle to drive;
- and
- a steering guide rail configured to guide a driving direction of the transport vehicle at a branching part where the driving rail branches off,
- wherein the steering guide rail comprises:
- a vertical guide part configured to guide the transport vehicle, wherein a plurality of horizontal steering wheels of the transport vehicle contact the vertical guide part;
- and
- a horizontal guide part configured to guide the transport vehicle, wherein a plurality of vertical steering wheels of the transport vehicle contact the horizontal guide part,
- wherein the horizontal guide part comprises:
- a vertical structure physically separated from the vertical guide part and installed to face the vertical guide part;
- and
- a horizontal structure connected to the vertical structure and protruding toward the vertical guide part in a horizontal direction,
- wherein the vertical structure of the horizontal guide part extends in parallel to the horizontal guide part, and
- wherein the horizontal structure of the horizontal guide part is physically separated from the vertical guide part.
A transport system in a fabrication facility, the transport system comprising:
- a transport vehicle;
- and
- a rail for a movement of the transport vehicle,
- wherein the rail comprises:
- a driving rail configured to provide a path for the transport vehicle to drive;
- and
- a steering guide rail configured to guide a driving direction of the transport vehicle at a branching part where the driving rail branches off,
- wherein the steering guide rail comprises:
- a vertical guide part configured to guide the transport vehicle, with a plurality of horizontal steering wheels of the transport vehicle contacting the vertical guide part;
- and
- a horizontal guide part configured to guide the transport vehicle, a plurality of vertical steering wheels of the transport vehicle contacting the horizontal guide part,
- wherein the horizontal guide part comprises:
- a vertical structure physically separated from the vertical guide part and installed to face the vertical guide part;
- and
- a horizontal structure connected to the vertical structure and protruding toward the vertical guide part in a horizontal direction,
- wherein the vertical structure of the horizontal guide part extends in parallel to the horizontal guide part, and
- wherein the horizontal structure of the horizontal guide part is physically separated from the vertical guide part.
Dependencies are inferred from the claim text.