Polishing apparatus and polishing method

A polishing apparatus configured to polish a peripheral edge of an object, the apparatus comprising:

• a stage having a mounting surface to mount the object;
• a polishing head configured to press a polishing surface against the peripheral edge and polish the peripheral edge;
• a first inlet configured to supply liquid to the polishing surface;
• and
• a protector having
• a front surface extending along a first direction intersecting with the mounting surface, the front surface having an opening between the stage and the polishing head in a second direction intersecting with the first direction,
• a first side surface extending along the second direction, and
• a second side surface extending along the second direction,
• the polishing head is provided between the first side surface and the second side surface in a third direction intersecting the second direction,
• wherein the protector further has
• an upper surface provided above the polishing head and having the first inlet, and
• a lower surface provided under the polishing head.

A polishing apparatus configured to polish a peripheral edge of an object, the apparatus comprising:

• a stage having a mounting surface to mount the object;
• a polishing head configured to press a polishing surface against the peripheral edge and polish the peripheral edge;
• a first inlet configured to supply liquid to the polishing surface;
• and
• a protector having
• a front surface extending along a first direction intersecting with the mounting surface, the front surface having an opening between the stage and the polishing head in a second direction intersecting with the first direction,
• a first side surface extending along the second direction, and
• a second side surface extending along the second direction,
• the polishing head is provided between the first side surface and the second side surface in a third direction intersecting the second direction,
• wherein:
• the polishing surface is provided on a polishing tape having a first opening;
• and
• the polishing head has a second opening connected to the first inlet and extending through the polishing head in the second direction.

A polishing method for polishing a peripheral edge of an object, the polishing method comprising:

• mounting the object onto a mounting surface of a stage;
• supplying a liquid onto a polishing surface;
• and
• pressing the polishing surface against the peripheral edge by a polishing head through a protector, and polishing the peripheral edge, the protector having a first surface extending along a first direction intersecting with the mounting surface, the first surface having an opening between the stage and the polishing head in a second direction intersecting with the first direction,
• wherein
• the liquid is supplied onto a polishing surface without the liquid being supplied onto a surface of the object on which a pattern is formed.