Texturizing a surface without bead blasting
AssigneeApplied Materials, Inc.
InventorsGang Peng, David W. Groechel, Jenn C. Chow, Tuochuan Huang, Han Wang
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AssigneeApplied Materials, Inc.
InventorsGang Peng, David W. Groechel, Jenn C. Chow, Tuochuan Huang, Han Wang
Estimating the term…
A system to provide a texture to a surface of a component for use in a semiconductor processing chamber is provided. The system includes an enclosure comprising a processing region, a support disposed in the processing region, a photon light source to generate a stream of photons, an optical module operably coupled to the photon light source, and a lens. The optical module includes a beam modulator to create a beam of photons from the stream of photons generated from the photon light source, and a beam scanner to scan the beam of photons across the surface of the component. The lens is used to receive the beam of photons from the beam scanner and distribute the beam of photons at a wavelength in a range between about 345 nm and about 1100 nm across the surface of the component to form a plurality of features on the component.
A component for use in a semiconductor processing chamber, the component comprising:
A gas distribution showerhead for use in a semiconductor processing chamber, the gas distribution showerhead comprising:
A method of providing a texture to a surface of a component for use in a semiconductor processing chamber, comprising:
Dependencies are inferred from the claim text.