Methods related to gradient raised frames in film bulk acoustic resonators
AssigneeSkyworks Global Pte. Ltd.
InventorsJiansong Liu, Kwang Jae Shin, Jae Hyung Lee, Benjamin Paul Abbott, Chun Sing Lam
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Abstract
Methods related to gradient raised frames in film bulk acoustic resonators. According to certain aspects, a method for fabricating a film bulk acoustic resonator device can include: forming a first metal layer over a substrate; forming a piezoelectric layer; forming a second metal layer, the piezoelectric layer positioned between the first and second metal layers; and forming a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves.
Claims20
A method for fabricating a film bulk acoustic resonator device, the method comprising:
- forming a first metal layer over a substrate;
- forming a piezoelectric layer;
- forming a second metal layer, the piezoelectric layer positioned between the first and second metal layers, the first metal layer, the second metal layer, and the piezoelectric layer forming an active region;
- and
- forming a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves, the gradient raised frame including a gradient portion that interfaces with one or more of the first metal layer, the second metal layer, or the piezoelectric layer without passing through the active region.
Dependencies are inferred from the claim text.