Film formation device, film formation method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsHiroshi Kurosawa, Toshiki Ito
Life of this patent
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Abstract
A film formation device for forming a film of a composition on the substrate by irradiating the composition on the substrate with light, includes an optical modulation unit for forming a distribution of an integrated light amount of the light on the substrate, and a control unit for controlling the optical modulation unit, in which the control unit controls the distribution of the integrated light amount of the optical modulation unit on the basis of residual film ratio characteristics of the composition and at least one of a curved shape of an imaging plane of an original template used in a subsequent process and a surface shape of a base film formed on the substrate.
Claims13
A film formation device for forming a film of a composition on a substrate by irradiating the composition on the substrate with light, comprising:
- at least one processor or circuit configured to function as:
- an optical modulation unit configured to form a distribution of an integrated light amount of the light on the substrate;
- and
- a measurement unit configured to measure at least one of a curved shape of an imaging plane of an original plate used in a subsequent process, a surface shape and a thickness of the film of the composition formed on the substrate;
- a control unit configured to control the optical modulation unit,
- wherein the control unit controls the distribution of the integrated light amount of the optical modulation unit on the basis of residual film ratio characteristics of the composition and at least one of a curved shape of an imaging plane of an original plate used in a subsequent process and a surface shape of a base film formed on the substrate, and
- the control unit corrects the integrated light amount on the basis of a measurement result of the measurement unit.
A film formation method for forming a film of a composition on a substrate by irradiating the composition on the substrate with light, comprising:
- a process of measuring at least one of a curved shape of an imaging plane of an original plate used in a subsequent process, a surface shape and a thickness of the film of the composition formed on the substrate,
- a process of forming a distribution of an integrated light amount of the light on the substrate,
- wherein the distribution of the integrated light amount is determined on the basis of residual film ratio characteristics of the composition and at least one of a curved shape of an imaging plane of an original plate used in a subsequent process and a surface shape of a base film formed on the substrate.
An article manufacturing method for manufacturing an article from a substrate, comprising:
- a process of measuring at least one of a curved shape of an imaging plane of an original plate used in a subsequent process, a surface shape and a thickness of the film of the composition formed on the substrate,
- a process of forming a film of a composition on the substrate by irradiating the composition on the substrate with light;
- a process of forming a distribution of an integrated light amount of the light on the substrate,
- wherein the distribution of the integrated light amount is determined on the basis of residual film ratio characteristics of the composition and at least one of a curved shape of an imaging plane of an original plate used in a subsequent process and a surface shape of a base film formed on the substrate;
- a process of disposing a photoresist film on the film;
- a process of patterning the photoresist film by exposure and development processes to form a photoresist pattern;
- and
- a process of processing the substrate using the photoresist pattern.
Dependencies are inferred from the claim text.