Resist underlayer film-forming composition
AssigneeNissan Chemical Corporation
InventorsHiroto Ogata, Hirokazu Nishimaki, Makoto Nakajima, Yuki Mitsutake, Hayato Hattori
Life of this patent
Estimating the term…
Loading patent…
AssigneeNissan Chemical Corporation
InventorsHiroto Ogata, Hirokazu Nishimaki, Makoto Nakajima, Yuki Mitsutake, Hayato Hattori
Estimating the term…
A resist underlayer film forming composition contains a reaction product of an aromatic compound (A) having 6 to 60 carbon atoms and a compound represented by formula (B), and a solvent. (In the formula, X represent an oxygen atom or a nitrogen atom; Y represents a single bond, an oxygen atom or a nitrogen atom; X and Y may combine with each other to form a ring; and each of R1, R2, R3 and R4 independently represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, a cyclic alkyl group having 3 to 8 carbon atoms or an aromatic group having 6 to 10 carbon atoms; provided that R2 is present only in cases where X is a nitrogen atom, and R4 is present only in cases where Y is a nitrogen atom.)
A resist underlayer film-forming composition comprising a solvent and a silicon-free reaction product of a C6-C60 aromatic compound (A) that is at least one member selected from the group consisting of:
A silicon-free copolymer of a C6-C60 aromatic compound (A) and a maleimide derivative represented by the following formula (C):
Dependencies are inferred from the claim text.