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US 12,313,969 B2Granted
Lithographically patterned electrically conductive hydrogels, photo-curable compositions, and elastomers formed from such compositions
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsJia Liu, Yuxin Liu, Zhenan Bao
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Abstract
A photo-curable composition includes a fluorinated monomer including cross-linkable functional groups, and a photoinitiator. Manufacturing methods using the photo-curable composition are provided.
Claims21
A manufacturing method for forming a patterned layer, the method comprising:
- applying a photo-curable composition to a surface of a substrate;
- selectively curing the photo-curable composition;
- and
- developing and removing uncured regions of the photo-curable composition to form the patterned layer on the surface;
- wherein:
- the photo-curable composition comprises:
- a perfluorinated monomer including cross-linkable functional groups;
- and
- a photoinitiator.
6 more elements
A manufacturing method for forming an electrically active layer, the method comprising:
- applying a photo-curable composition to a substrate;
- selectively curing the photo-curable composition to form a selectively cured layer on the substrate;
- developing and removing uncured regions of the selectively cured layer to form a patterned photoresist layer on the substrate;
- forming an electrically active layer on the patterned photoresist layer;
- and
- patterning the electrically active layer using the patterned photoresist layer to form a patterned electrically active layer;
- wherein:
- the photo-curable composition comprises:
- a perfluorinated monomer including cross-linkable functional groups;
- and
- a photoinitiator.
8 more elements
Dependencies are inferred from the claim text.