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US 12,313,885 B2Granted
Photonics grating coupler and method of manufacture
AssigneeMicron Technology, Inc.
InventorHarel Frish
Life of this patent
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Abstract
A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.
Claims19
An integrated photonic structure, comprising:
- a substrate;
- a lower cladding material disposed over the substrate;
- a waveguide core disposed over the lower cladding;
- and
- an upper cladding material disposed over the waveguide core, the upper cladding material including a sloped grating coupler configured to redirect light into or out of the waveguide core in a direction normal to a planar upper surface of the integrated photonic structure.
2 more elements
A method of making an integrated photonic structure, comprising:
- providing a substrate;
- disposing a lower cladding material over the substrate;
- disposing a waveguide core over the lower cladding;
- and
- disposing an upper cladding material over the waveguide core, the upper cladding material including a sloped grating coupler configured to redirect light into or out of the waveguide core in a direction normal to a planar upper surface of the integrated photonic structure.
2 more elements
Dependencies are inferred from the claim text.