Real-time modification of line focus intensity distribution

A method, comprising:

• modifying an optically transmissive glass substrate to a first depth of the optically transmissive glass substrate at a first time during a single modification pass using a first output of an optic, wherein the first output is based at least in part on an input of the optic comprising a first polarized laser beam having a first beam width from a first optic;
• adjusting the first output of the optic to a second output of the optic during the single modification pass using a beam deflector, wherein the second output is based at least in part on the input being adjusted to comprise a second polarized laser beam having a second beam width from a second optic;
• and
• modifying the optically transmissive glass substrate to a second depth of the optically transmissive glass substrate less than the first depth at a second time during the single modification pass using the second output of the optic,
• wherein:
• modifying the optically transmissive glass substrate to the first depth comprises fully perforating the optically transmissive glass substrate through a full depth of the optically transmissive glass substrate, and
• modifying the optically transmissive glass substrate to the second depth comprises partially perforating the optically transmissive glass substrate through less than the full depth of the optically transmissive glass substrate.