Light scanning apparatus

A light scanning apparatus for causing a mirror to oscillate to scan with light reflected by the mirror, the light scanning apparatus comprising:

• an insulating film;
• a base film disposed on the insulating film, and including titanium;
• an interconnect disposed on the base film, the interconnect being formed of gold;
• a protective film for covering the interconnect;
• and
• an adhesive film formed between the interconnect and the protective film,
• wherein the interconnect includes an end portion, the end portion including a region that serves as a terminal, and the end portion having a surface exposed through an opening that is provided by removing both a portion of the adhesive film and a portion of the protective film,
• wherein the adhesive film includes a first edge surface, and the protective film includes a second edge surface,
• wherein the first edge surface and the second edge surface are obtained with the removal of the portion of the adhesive film and the portion of the protective film,
• wherein the first edge surface is aligned with the second edge surface as viewed in a direction perpendicular to an exposed surface of the end portion in the interconnect,
• wherein the protective film is formed of an inorganic oxide,
• wherein the adhesive film includes titanium that is oxidized with the inorganic oxide in the protective film to form a compound, the compound bonding with oxygen that is included in the inorganic oxide,
• wherein the adhesive film is coupled to the interconnect upon occurrence of a condition in which the titanium in the adhesive film is diffused into the gold in the interconnect, and
• wherein the base film contacts the insulating film and the interconnect.