X-ray diffraction apparatus and measurement method
AssigneeRigaku Corporation
InventorHisashi Konaka
Life of this patent
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Abstract
According to an aspect of the present invention, an X-ray diffraction apparatus is provided. The X-ray diffraction apparatus comprises: an X-ray source configured to irradiate a sample with an X-ray; a sample stage configured to allow the sample to be disposed in such a manner that the X-ray is diffracted; a detector configured to detect a diffracted X-ray, which is the X-ray that has been diffracted, in one dimension at a detection strip; a slit member provided between the sample stage and the detector, comprising a slit through which the diffracted X-ray can pass; wherein an axis in a longitudinal direction of the slit is parallel to an axis in a longitudinal direction of the detection strip.
Claims12
An X-ray diffraction apparatus, comprising:
- an X-ray source configured to irradiate a sample with an X-ray;
- a sample stage configured to allow the sample to be disposed in such a manner that the X-ray is diffracted;
- a detector configured to detect a diffracted X-ray, which is the X-ray that has been diffracted, in one dimension at a detection strip;
- and
- a slit member
- provided between the sample stage and the detector,
- comprising a slit through which the diffracted X-ray can pass,
- wherein an axis in a longitudinal direction of the slit is parallel to an axis in a longitudinal direction of the detection strip, and
- wherein a diffraction angle of the diffracted X-ray depends on a distance from the slit to the detector.
A measurement method of a sample, comprising:
- irradiating the sample with an X-ray, and allowing the X-ray to diffract;
- allowing a diffracted X-ray, which is the X-ray that has been diffracted, to pass through a slit;
- and
- measuring the sample by detecting the diffracted X-ray in one dimension with a detection strip;
- wherein
- an axis in a longitudinal direction of the slit is parallel to an axis in a longitudinal direction of the detection strip, and
- wherein a diffraction angle of the diffracted X-ray depends on a distance from the slit to the detector.
Dependencies are inferred from the claim text.