Laser-induced breakdown spectroscope

A laser-induced breakdown spectroscope, which performs component analysis of an analyte in a depth direction of the analyte using laser induced breakdown spectroscopy, the laser-induced breakdown spectroscope comprising:

• an emitter that emits laser light to the analyte;
• a collection head that collects plasma light generated on the analyte by irradiating the analyte with the laser light emitted from the emitter;
• a detector that receives the plasma light generated on the analyte and collected by the collection head, and generates a spectrum which is an intensity distribution of the plasma light for each wavelength;
• a library holding section that holds a substance library including a plurality of constituent elements constituting a plurality of substances and a content of the plurality of constituent elements as an information for identifying each of the plurality of substances;
• a component analysis section that estimates constituent elements constituting the analyte and a content of the constituent elements based on the spectrum generated by the detector, and estimates a substance contained in the analyte based on the estimated constituent elements, the estimated content of the constituent elements and the substance library held in the library holding section;
• and
• a display controller that causes a display to display the constituent elements and the content of the constituent elements, estimated by the component analysis section, and the information for identifying the substance,
• wherein the emitter emits the laser light to a same analysis point of the analyte a plurality of times to irradiate a plurality of positions having different analysis depths with the laser light,
• the component analysis section executes estimation of the constituent elements constituting the analyte and the content of the constituent elements and estimation of the substance contained in the analyte at each of the plurality of positions having the different analysis depths, and
• the display controller causes the display to display a depth analysis window indicating the constituent elements and the contents of the constituent elements at the plurality of positions having the different analysis depths, estimated by the component analysis section, and the information for identifying the substance corresponding to the substance contained in the analyte estimated by the component analysis section, along the different analysis depths and aligned from top to bottom of the display for the different analysis depths from a surface to a lower layer of the analyte.