MEMS switch and manufacture method

A flexible Micro-Electro-Mechanical System (MEMS) switch, comprising an MEMS body and a packaging body outside the MEMS body, wherein the packaging body comprises a first flexible cover plate and a second flexible cover plate, the first flexible cover plate and the second flexible cover plate are arranged at opposite sides of the MEMS body respectively, a first cavity is formed between the first flexible cover plate and the MEMS body, and a second cavity is formed between the second flexible cover plate and the MEMS body;

• wherein the MEMS body comprises a flexible base substrate and a functional element on the flexible base substrate, the flexible base substrate comprises a first portion where the functional element is arranged and a second portion surrounding the first portion, the second portion is of an annular shape and coupled to the packaging body, the first portion comprises a plurality of side walls facing the second portion, the plurality of side walls comprises at least a first side wall, and a part of the first side wall in an extension direction of the first side wall is depressed in a direction away from the second portion to form a gap between the first side wall and the second portion.