US 12,310,041 B2 · Metal-insulator-metal (MIM) capacitor module with outer electrode extension

Abstract

A metal-insulator-metal (MIM) capacitor module includes an outer electrode, an insulator, an inner electrode, an outer electrode extension structure, an inner electrode contact element, and an outer electrode contact element. The outer electrode includes a plurality of vertically-extending outer electrode sidewalls. The insulator is formed in an opening defined by the vertically-extending outer electrode sidewalls, and includes a plurality of vertically-extending insulator sidewalls. The inner electrode formed in an interior opening defined by the insulator. The outer electrode extension structure extends laterally from a particular vertically-extending outer electrode sidewall. The inner electrode contact element and outer electrode contact element are formed in a metal layer. The inner electrode contact element is electrically connected to the inner electrode, and the outer electrode contact element is electrically connected to the outer electrode extension structure.

Claims12

Dependent claims

A metal-insulator-metal (MIM) capacitor module, comprising:

an outer electrode comprising a plurality of vertically-extending outer electrode sidewalls;
an insulator formed in an opening defined by the plurality of vertically-extending outer electrode sidewalls, the insulator comprising a plurality of vertically-extending insulator sidewalls;
an inner electrode formed in an interior opening defined by the plurality of vertically-extending insulator sidewalls;
wherein respective ones of the plurality of vertically-extending insulator sidewalls are arranged between the inner electrode and a respective one of the plurality of vertically-extending outer electrode sidewalls;
an outer electrode extension structure extending laterally from a particular vertically-extending outer electrode sidewall of the plurality of vertically-extending outer electrode sidewalls;
and
an inner electrode contact element and an outer electrode contact element formed in a metal layer, wherein the inner electrode contact element is electrically connected to the inner electrode, and the outer electrode contact element is electrically connected to the outer electrode extension structure.

4 more elements

A device, comprising:

a metal-insulator-metal (MIM) capacitor module, comprising:
an outer electrode comprising a plurality of vertically-extending outer electrode sidewalls formed from a conformal metal;
an insulator formed in an opening defined by the plurality of vertically-extending outer electrode sidewalls, the insulator comprising a plurality of vertically-extending insulator sidewalls;
an inner electrode formed in an interior opening defined by the plurality of vertically-extending insulator sidewalls;
wherein respective ones of the plurality of vertically-extending insulator sidewalls are arranged between the inner electrode and a respective one of the plurality of vertically-extending outer electrode sidewall;
and
an outer electrode extension structure extending laterally from a particular vertically-extending outer electrode sidewall of the plurality of vertically-extending outer electrode sidewalls;
an inner electrode contact element and an outer electrode contact element formed in a metal layer, wherein the inner electrode contact element is electrically connected to the inner electrode, and the outer electrode contact element is electrically connected to the outer electrode extension structure;
and
an integrated circuit (IC) component structure, comprising:
an IC component;
a vertically extending IC component contact formed from the conformal metal, the vertically extending IC component contact formed above the IC component and electrically connected to the IC component;
and
an IC component connection element formed in the metal layer and electrically connected to the vertically extending IC component contact.

11 more elements

Dependencies are inferred from the claim text.

Metal-insulator-metal (MIM) capacitor module with outer electrode extension

Life of this patent

Metal-insulator-metal (MIM) capacitor module with outer electrode extension

Life of this patent

Abstract

Claims12