Surface acoustic wave resonator device and manufacturing method therefor and filter

A manufacturing method for a surface acoustic wave resonator device, wherein the surface acoustic wave resonator device has a body region and a peripheral region, and the peripheral region comprises a first peripheral region and a second peripheral region located at two opposite sides of the body region in a first direction,

• the manufacturing method comprises:
• providing a piezoelectric substrate;
• forming an interdigital transducer on a side of the piezoelectric substrate, wherein the interdigital transducer comprises a plurality of interdigital electrodes, a first interdigital electrode lead-out part and a second interdigital electrode lead-out part, and the plurality of interdigital electrodes comprise a first interdigital electrode and a second interdigital electrode extending along the first direction and alternately arranged along a second direction intersecting with the first direction;
• wherein the first interdigital electrode is located in the body region and extends across the first peripheral region to be connected to the first interdigital electrode lead-out part, and the second interdigital electrode is located in the body region and extends across the second peripheral region to be connected to the second interdigital electrode lead-out part;
• and
• forming a conductive structure on a side of the interdigital transducer away from the piezoelectric substrate, wherein the conductive structure at least overlaps with end portions of the plurality of interdigital electrodes close to the peripheral region in a third direction perpendicular to a main surface of the piezoelectric substrate,
• wherein the conductive structure at least comprises a body structure and a first sawtooth structure, the body structure continuously extends across the plurality of interdigital electrodes in the second direction, the first sawtooth structure is located at a side of the body structure away from the peripheral region in the first direction, and at least a portion of the body structure and the first sawtooth structure overlap with the end portions of the plurality of interdigital electrodes in the third direction.