Matrix addressable vertical cavity surface emitting laser array
AssigneeLumentum Operations LLC
InventorsYeyu Zhu, Eric R. Hegblom, Yuefa Li
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Abstract
In some implementations, a vertical cavity surface emitting laser (VCSEL) array may include a substrate. In some implementations, the VCSEL array may include a set of cathodes disposed on the substrate in a first direction, wherein a cathode, of the set of cathodes, is defined by a serpentine shape. In some implementations, the VCSEL array may include a set of anodes disposed on the substrate in a second direction, wherein an anode, of the set of anodes, is defined by the serpentine shape.
Claims20
A vertical cavity surface emitting laser (VCSEL) array, comprising:
- a substrate;
- a set of emitters disposed in a grid arrangement;
- a set of cathodes disposed on the substrate in a first direction, wherein a cathode, of the set of cathodes, is defined by a serpentine shape,
- wherein the cathode is disposed between a first column and a second column of the set of cathodes in the grid arrangement, in the first direction, and
- wherein the serpentine shape of the cathode is defined by curves configured around a subset of the set of emitters that are in the first column and the second column;
- and
- a set of anodes disposed on the substrate in a second direction, wherein an anode, of the set of anodes, is defined by the serpentine shape.
A vertical cavity surface emitting laser (VCSEL) array, comprising:
- a substrate;
- a set of cathodes disposed on the substrate in a first direction,
- wherein a cathode of the set of cathodes is defined by a serpentine shape;
- a set of anodes disposed on the substrate in a second direction;
- and
- a set of emitters disposed on the substrate in a grid arrangement,
- wherein the cathode is disposed between a first column and a second column of the set of cathodes in the grid arrangement, in the first direction,
- wherein the serpentine shape of the cathode is defined by curves configured around a subset of the set of emitters that are in the first column and the second column, and
- wherein an emitter, of the set of emitters, is associated with a set of first trenches and a set of second trenches,
- wherein the set of first trenches comprises a set of n-epi etching trenches that etch an n-contact layer of the substrate, and
- wherein the set of second trenches comprises a set of small trenches that, with the set of first trenches, forms an oxidation aperture for the emitter.
A vertical cavity surface emitting laser (VCSEL) array, comprising:
- a substrate;
- a set of cathodes disposed on the substrate in a first direction, wherein a cathode, of the set of cathodes, is defined by a serpentine shape;
- a set of anodes disposed on the substrate in a second direction, wherein an anode, of the set of anodes, is defined by the serpentine shape;
- and
- a set of emitters disposed on the substrate in a hexagonal grid arrangement,
- wherein the cathode is disposed between a first column and a second column of the set of cathodes in the grid arrangement, in the first direction,
- wherein the serpentine shape of the cathode is defined by curves configured around a subset of the set of emitters that are in the first column and the second column, and
- wherein an emitter, of the set of emitters, is associated with a set of first trenches and a set of second trenches,
- wherein the set of first trenches comprises a set of n-epi etching trenches that etch an n-contact layer of the substrate, and
- wherein the set of second trenches comprises a set of small trenches that, with the set of first trenches, forms an oxidation aperture for the emitter.
Dependencies are inferred from the claim text.