Anchor and cavity configuration for MEMS-based cooling systems

A cooling system, comprising:

• a bottom plate having a plurality of orifices therein;
• a support structure;
• a cooling element having a central axis, the cooling element being supported by the support structure at the central axis such that a first portion of the cooling element on a first side of the central axis and a second portion of the cooling element on a second side of the central axis opposite to the first side are unpinned, the first portion and the second portion being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure, the support structure coupling the cooling element to the bottom plate;
• and
• wherein at least one of the support structure is an adhesive support structure or the support structure undergoes rotational motion in response to the vibrational motion, the adhesive support structure having at least one lateral dimension defined by a trench in the cooling element or the bottom plate, wherein the bottom plate includes a cavity therein, the bottom plate having a thickness, the cavity having a depth and a cavity width, the support structure having an anchor width, and the bottom plate including a material, at least one of the depth, the anchor width, the thickness, or the material being configured to increase the rotational motion of the support structure.

A cooling system, comprising:

• a plurality of cooling cells, each of the plurality of cooling cells including a bottom plate having a plurality of orifices therein, a support structure and a cooling element, the cooling element having a central axis, the cooling element being supported by the support structure at the central axis such that a first portion of the cooling element on a first side of the central axis and a second portion of the cooling element on a second side of the central axis opposite to the first side are unpinned, the first portion and the second portion configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure, the support structure coupling the cooling element to the bottom plate;
• and
• wherein at least one of the support structure is an adhesive support structure or the support structure undergoes rotational motion in response to the vibrational motion, the adhesive support structure having at least one lateral dimension defined by a trench in the cooling element or the bottom plate, wherein the bottom plate includes a cavity therein, the bottom plate having a thickness, the cavity having a depth and a cavity width, the support structure having an anchor width, and the bottom plate including a material, at least one of the depth, the anchor width, the thickness, or the material being configured to increase the rotational motion of the support structure.

A method, comprising:

• driving a cooling element to induce a vibrational motion at a frequency, the cooling element being part of a cooling cell, the cooling cell including a bottom plate having a plurality of orifices therein, a support structure, the cooling element having a central axis, the cooling element being supported by the support structure at the central axis such that a first portion of the cooling element on a first side of the central axis and a second portion of the cooling element on a second side of the central axis opposite to the first side are unpinned, the first portion and the second portion being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure, the support structure coupling the cooling element to the bottom plate, at least one of the support structure being an adhesive support structure or the support structure undergoes rotational motion in response to the vibrational motion, the adhesive support structure having at least one lateral dimension defined by a trench in the cooling element or the bottom plate, wherein the bottom plate includes a cavity therein, the bottom plate having a thickness, the cavity having a depth and a cavity width, the support structure having an anchor width, and the bottom plate including a material, at least one of the depth, the anchor width, the thickness, or the material being configured to increase the rotational motion of the support structure.