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US 12,305,652 B2Granted
Vacuum pump
AssigneeEdwards Japan Limited
InventorToshiki Yamaguchi
Life of this patent
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Abstract
A vacuum pump is provided with which, even in the event of breakage of a rotor blade, broken pieces of the rotor blade are unlikely to scatter from an outlet port. A vacuum pump includes a rotor blade configured to rotate about a vertical axis and a casing housing the rotor blade, and is configured to exhaust sucked gas in a radial direction of the rotor blade by rotation of the rotor blade. An outlet port for the gas is provided at a position that is offset from a position of a gas exit portion of the rotor blade in a direction of the vertical axis.
Claims9
A vacuum pump comprising:
- a rotor blade configured to rotate about a vertical axis and having a gas exit portion extending in a vertical direction to define a vertical extent;
- a casing housing the rotor blade;
- and
- an unobstructed annular buffer space extending in a radial direction between the entire vertical extent of the gas exit portion to an annular surface, wherein
- the vacuum pump is configured to exhaust sucked gas in the radial direction of the rotor blade by rotation of the rotor blade, and
- an outlet port for the gas is provided at a position that is offset from a position of the gas exit portion of the rotor blade in a direction of the vertical axis.
3 more elements
Dependencies are inferred from the claim text.