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US 12,304,875 B2Granted
Plasma-resistant member
AssigneeToto Ltd.
InventorsJunichi Iwasawa, Toshihiro Aoshima
Life of this patent
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Abstract
According to an aspect of the invention, there is provided a plasma-resistant member including: a base member; and a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant, the layer structural component including a first uneven structure, and a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure.
Claims8
A plasma-resistant member, comprising:
- a base member;
- and
- a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant,
- the layer structural component including
- a first uneven structure, and
- a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure,
- the second uneven structure has an unevenness in an entire surface of the layer structural component, a size of crystal particles of the unevenness being fine, and a diameter of the average crystal particle being not more than 50 nm.
4 more elements
Dependencies are inferred from the claim text.