Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride
AssigneeCentral Glass Company, Limited
InventorsMitsuya Ohashi, Takanori Hamana, Takanori Ogata, Ryuichi Nakamura
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Abstract
A tungsten hexafluoride manufacturing method of the present invention includes a reaction step of reacting tungsten containing arsenic or an arsenic compound with a gas of a fluorine element-containing compound so as to obtain a mixture containing tungsten hexafluoride and a trivalent arsenic compound, and a distillation step of distilling and purifying the mixture so as to separate and remove a fraction containing the trivalent arsenic compound and to obtain tungsten hexafluoride.
Claims20
A method of manufacturing tungsten hexafluoride, comprising:
- a reaction step comprising reacting tungsten containing arsenic or an arsenic compound with a gas of a fluorine element-containing compound, so as to obtain a mixture comprising tungsten hexafluoride and a trivalent arsenic compound;
- and
- a distillation step comprising distilling and purifying the mixture so as to separate and remove a first fraction comprising the trivalent arsenic compound and to obtain tungsten hexafluoride.
A method of manufacturing tungsten hexafluoride, comprising:
- a reaction step comprising reacting tungsten containing arsenic or an arsenic compound with a gas of a fluorine element-containing compound, so as to obtain an intermediate product comprising a pentavalent arsenic compound and tungsten hexafluoride, and a step of bringing the intermediate product into contact with a reducing substance so as to convert at least a part of the pentavalent arsenic compound into a trivalent arsenic compound and to obtain a mixture;
- and
- a distillation step comprising distilling and purifying the mixture so as to separate and remove a fraction comprising the trivalent arsenic compound and to obtain tungsten hexafluoride.
Dependencies are inferred from the claim text.