Actuator device
AssigneeHamamatsu Photonics K.K.
InventorsSadaharu Takimoto, Yuki Morinaga, Daiki Suzuki, Yoshihisa Warashina
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AssigneeHamamatsu Photonics K.K.
InventorsSadaharu Takimoto, Yuki Morinaga, Daiki Suzuki, Yoshihisa Warashina
Estimating the term…
An actuator device includes a support portion, a movable portion, a connection portion, a first wiring provided to the connection portion, a second wiring provided to the movable portion, a first insulation layer which includes a first opening exposing a surface opposite to the movable portion in a first connection part located at the movable portion in one wiring of the first and second wirings, a second insulation layer covering the first and second wirings. The other wiring of the first and second wirings is connected to the surface of the first connection part in the first opening. A region corresponding to a corner of the other wiring of the first and second wirings in a surface opposite to the movable portion in the second insulation layer is curved in a convex shape toward an opposite side to the movable portion.
An actuator device comprising:
An actuator device comprising:
Dependencies are inferred from the claim text.