Micro-electro-mechanical system fluid control
AssigneeWater Stuff & Sun GmbH
InventorJohan Bejhed
Life of this patent
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Abstract
A fluid-control device comprises a stack of wafers in which flow components are provided as micro-electro-mechanical systems—MEMS. The flow components are selected from fluid-control components and/or fluid-monitor components. The fluid-control device has a first flow component that is encircled, in a main plane of the stack of wafers, by a second flow component.
Claims20
A fluid-control device, comprising a stack of wafers in which flow components are provided as micro-electro-mechanical systems—MEMS, said flow components being selected from at least one of fluid-control components and fluid-monitor components, wherein a first said flow component is encircled, in a main plane of said stack of wafers, by a second said flow component, wherein
- at least two said flow components comprise a respective deformable membrane.
Dependencies are inferred from the claim text.