Grinding wheel
AssigneeDisco Corporation
InventorMasaru Nagami
Life of this patent
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AssigneeDisco Corporation
InventorMasaru Nagami
Estimating the term…
A grinding wheel is mounted on a tip end of a spindle and the grinding wheel grinds a workpiece according to rotation of the spindle. The grinding wheel includes an annular base, and a plurality of grindstone sets disposed in an annular manner on one surface side of the base along a circumferential direction of the base. Each of the plurality of grindstone sets has a first grindstone and a second grindstone having a self-sharpening capability lower than that of the first grindstone, such that the first grindstone and the second grindstone are adjacent to each other in a predetermined orientation in the circumferential direction of the base, and a predetermined interval larger than an interval between the first grindstone and the second grindstone in the circumferential direction of the base is provided between adjacent ones of the grindstone sets.
A grinding method of grinding a workpiece having a single crystal substrate formed with a non-single crystal layer on a front surface of the substrate, with use of a grinding wheel,
A grinding method of grinding a workpiece having a substrate formed with a film on a front surface of the substrate, with use of a grinding wheel,
Dependencies are inferred from the claim text.