Jig for mounting and dismounting processing tool

A method of mounting a processing tool, by using a jig, on a mount of a processing apparatus,

• the processing apparatus including
• a chuck table having a holding surface for holding a workpiece thereon,
• a spindle being disposed above the holding surface of the chuck table and having a distal end portion to which the mount for supporting the processing tool mounted thereon is fixed, and
• a seat structure disposed around the chuck table,
• the jig including
• a first support for supporting the processing tool thereon,
• a second support positioned below the first support and supported on the seat structure, and
• a main body disposed between the first support and the second support,
• the main body including
• a balloon that is expandable when gas is introduced thereinto and that is collapsible when the gas is discharged therefrom,
• an inlet port for introducing the gas therethrough into the balloon, and
• an outlet port for discharging the gas therethrough from the balloon,
• the method comprising:
• a placing step of placing the processing tool on the first support;
• a lifting step of, after the placing step, lifting the processing tool toward the mount by introducing the gas into the balloon to expand the balloon;
• and
• a fastening step of, after the lifting step, fastening the mount and a base of the processing tool to each other while the base of the processing tool is held in contact with the mount.

A method of dismounting a processing tool, by using a jig, from a mount of a processing apparatus,

• the processing apparatus including
• a chuck table having a holding surface for holding a workpiece thereon,
• a spindle being disposed above the holding surface of the chuck table and having a distal end portion to which the mount for supporting the processing tool mounted thereon is fixed, and
• a seat structure disposed around the chuck table,
• the jig including
• a first support for supporting the processing tool thereon,
• a second support positioned below the first support and supported on the seat structure, and
• a main body disposed between the first support and the second support,
• the main body including
• a balloon that is expandable when gas is introduced thereinto and that is collapsible when the gas is discharged therefrom,
• an inlet port for introducing the gas therethrough into the balloon, and
• an outlet port for discharging the gas therethrough from the balloon,
• the method comprising:
• a contacting step of bringing the first support into contact with the processing tool by introducing the gas into the balloon to expand the balloon;
• a releasing step of, after the contacting step, releasing the mount and a base of the processing tool from each other;
• and
• a lowering step of, after the releasing step, lowering the processing tool toward the second support by discharging the gas from the balloon to collapse the balloon.