Device and method for cleaning a gas stream
AssigneeDAS Environmental Expert GmbH
InventorsChang-Guo Hsu, Ting-Hao Lai, Ching-Pin Chen, Ying-Liang Chen
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AssigneeDAS Environmental Expert GmbH
InventorsChang-Guo Hsu, Ting-Hao Lai, Ching-Pin Chen, Ying-Liang Chen
Estimating the term…
A device, such as a wet scrubber for cleaning a stream of gas by removing gaseous, liquid and solid impurities, has a gas inlet and a gas outlet. At the gas inlet there is a first structured packing. A spray-scrubber area with atomizing nozzles is provided above the first structured packing. A first demister is provided for separating larger drops above the spray-scrubber area. A woven fabric is above the first demister, and spray nozzles are arranged around this woven fabric to spray washing liquid in the direction of the gas stream onto the surface of the woven fabric. A final demister is located above the woven fabric and has a demister rinsing apparatus. The device may be used to dispose of industrial waste gases encountered in the semiconductor industry, particularly for the disposal of waste gases stemming from CVD processes in microelectronics production.
A device for cleaning a stream of gas by removing gaseous,
A method for cleaning a stream of gas by removing gaseous, liquid and solid impurities, including but not limited to fine and ultrafine solid particles, comprising:
Dependencies are inferred from the claim text.