Transducer and electronic device
AssigneeRohm Co., Ltd.
InventorsTakashi Naiki, Noriyuki Shimoji, Tomohiro Date
Life of this patent
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AssigneeRohm Co., Ltd.
InventorsTakashi Naiki, Noriyuki Shimoji, Tomohiro Date
Estimating the term…
A transducer includes: a film support portion having a hollow portion; a vibration film displaceable in a film thickness direction; a piezoelectric element, the piezoelectric element including a pair of electrodes and a piezoelectric film; and in regions overlapping the hollow portion, a plurality of first regions having a first total film thickness which is a sum of a film thickness of the vibration film and a film thickness of the piezoelectric element, and a plurality of second regions having a second total film thickness which is a sum of a film thickness of the vibration film and a film thickness of the piezoelectric element, the second total film thickness being different from the first total film thickness. The first regions and the second regions are alternately arranged, and one of the first regions is adjacent to a connection portion between the film support portion and the vibration film.
A transducer comprising:
A transducer comprising:
A transducer comprising:
Dependencies are inferred from the claim text.