Piezoelectric motors with nanometer-level resolution

A piezoelectric motor comprising:

• A body having an upper surface and a lower surface, and a side connecting the upper surface and the lower surface,
• a piezoelectric material disposed on the upper surface of the body and extending longitudinally therefrom;
• and
• a rod having an upper surface and a lower surface, extending longitudinally and having a one end fixed to a one end of the piezoelectric material, and disposed on the upper surface of the body;
• and
• a support member disposed to span the rod, and providing a predetermined frictional force on the rod;
• and
• a position sensor for detecting a position of the support member,
• wherein the support member is driven by the rod to interlock with a contraction or an expansion of the piezoelectric material, and
• wherein the position sensor includes, a conductive strip disposed on one side parallel to a direction of driving of the support member, a first elastomer in contact with the conductive strip, and a resistance strip disposed on a different side of the support member opposite the one side, and a second elastomer in contact with the resistance strip, wherein the first elastomer and the second elastomer are arranged such that the elastic forces exerted on the support member cancel each other out.