Methods of forming wire interconnect structures and related wire bonding tools
AssigneeKulicke and Soffa Industries, Inc.
InventorsBasil Milton, Romeo Olida, Jonathan Geller, Tomer Levinson
Life of this patent
Estimating the term…
Abstract
A method of forming a wire interconnect structure includes the steps of: (a) forming a wire bond at a bonding location on a substrate using a wire bonding tool; (b) extending a length of wire, continuous with the wire bond, to a position above the wire bond; (c) moving the wire bonding tool to contact the length of wire, at a position along the length of wire, to partially sever the length of wire at the position along the length of wire; and (d) separating the length of wire from a wire supply at the position along the length of wire, thereby providing a wire interconnect structure bonded to the bonding location.
Claims3
A wire bonding tool comprising:
- a body portion defining a through hole extending along a length of the body portion, the through hole being configured to receive a length of wire, the through hole extending into a cavity at a tip portion of the wire bonding tool, the cavity having a diameter that varies along its length, the diameter of the cavity being larger than a diameter of the through hole, the diameter of the cavity being smaller at a working face of the wire bonding tool as compared to the diameter of the cavity adjacent the through hole.
Dependencies are inferred from the claim text.