Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method

An information processing method comprising:

• acquiring information including first processing data indicating a result of substrate processing performed by a first substrate processing apparatus, and second processing data indicating a result of substrate processing performed by a second substrate processing apparatus different from the first substrate processing apparatus;
• and
• controlling display on a display device based on the acquired information,
• wherein in the controlling, the first processing data and the second processing data are displayed in different regions, and information indicating a processing condition under which the substrate processing is performed is displayed, and
• the processing condition includes a recipe that is a processing condition shared by a plurality of apparatuses including the first substrate processing apparatus and the second substrate processing apparatus, and an apparatus parameter that is a processing condition not shared by the plurality of apparatuses.

A non-transitory computer-readable storage medium storing a program for causing a computer to execute an information processing method comprising:

• acquiring information including first processing data indicating a result of substrate processing performed by a first substrate processing apparatus, and second processing data indicating a result of substrate processing performed by a second substrate processing apparatus different from the first substrate processing apparatus;
• and
• controlling display on a display device based on the acquired information,
• wherein in the controlling, the first processing data and the second processing data are displayed in different regions, and information indicating a processing condition under which the substrate processing is performed is displayed, and
• the processing condition includes a recipe that is a processing condition shared by a plurality of apparatuses including the first substrate processing apparatus and the second substrate processing apparatus, and an apparatus parameter that is a processing condition not shared by the plurality of apparatuses.

An article manufacturing system comprising:

• a pattern forming apparatus configured to form a pattern on a substrate;
• and
• an information processing apparatus configured to manage a plurality of apparatuses including the pattern forming apparatus,
• wherein the information processing apparatus includes:
• an acquisition unit configured to acquire information including first processing data indicating a result of substrate processing performed by a first substrate processing apparatus, and second processing data indicating a result of substrate processing performed by a second substrate processing apparatus different from the first substrate processing apparatus;
• and
• a display control unit configured to control display on a display device based on the information acquired by the acquisition unit, and
• wherein the display control unit displays the first processing data and the second processing data in different regions, and displays information indicating a processing condition under which the substrate processing is performed, and
• the processing condition includes a recipe that is a processing condition shared by a plurality of apparatuses including the first substrate processing apparatus and the second substrate processing apparatus, and an apparatus parameter that is a processing condition not shared by the plurality of apparatuses.

An article manufacturing method comprising:

• forming a pattern on a substrate by using an article manufacturing system including a pattern forming apparatus configured to form a pattern on a substrate, and an information processing apparatus configured to manage a plurality of apparatuses including the pattern forming apparatus;
• processing the substrate on which the pattern is formed, by performing at least one of oxidation, film formation, deposition, doping, planarization, etching, resist removal, dicing, bonding, or packaging;
• and
• manufacturing an article from the processed substrate,
• wherein the information processing apparatus includes:
• an acquisition unit configured to acquire information including first processing data indicating a result of substrate processing performed by a first substrate processing apparatus, and second processing data indicating a result of substrate processing performed by a second substrate processing apparatus different from the first substrate processing apparatus;
• and
• a display control unit configured to control display on a display device based on the information acquired by the acquisition unit, and
• wherein the display control unit displays the first processing data and the second processing data in different regions, and displays information indicating a processing condition under which the substrate processing is performed, and
• the processing condition includes a recipe that is a processing condition shared by a plurality of apparatuses including the first substrate processing apparatus and the second substrate processing apparatus, and an apparatus parameter that is a processing condition not shared by the plurality of apparatuses.