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US 12,298,573 B1Granted
Self-aligned structure and method on interposer-based PIC
OwnerSuresh Venkatesaninventor
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Abstract
Alignment aid structures and the method of formation of these structures on an interposer comprised of a planar waveguide layer and a base structure, facilitate the alignment of the optical axes of optical and optoelectrical devices formed from and mounted to the interposer. Alignment aids formed from a common hard mask on the planar waveguide layer of the interposer structure include vertical and lateral alignment structures and fiducials. Optical losses for signals propagating in interposer-based photonic integrated circuits are reduced with effective alignment structures and methods.
Claims20
A method comprising
- forming a first optical component on a substrate,
- wherein the first optical component comprises a first optical axis,
- wherein the substrate is configured to accept a second optical component comprising a second optical axis;
- forming a first alignment aid element on the substrate,
- wherein the first alignment aid element comprises a first topmost surface,
- wherein the first topmost surface is separated by a first distance with the first optical axis,
- wherein the second optical component comprising a second topmost surface,
- wherein the second topmost surface is separated by a second distance with the second optical axis,
- wherein the first distance is matched with the second distance in a way that enables an alignment of the first optical axis with the second optical axis when the second optical component is assembled on the substrate with the first topmost surface contacting with the second topmost surface;
- and
- forming a second alignment aid element on the substrate,
- wherein the second alignment aid element comprises a third surface parallel to the first topmost surface,
- wherein the third surface is in a vicinity of the first optical axis,
- wherein the second alignment aid element comprises a fiducial pattern comprising the third surface,
- wherein the fiducial pattern is configured for laterally aligning the second optical component with the substrate.
12 more elements
A method comprising
- forming a first optical component on a first substrate,
- wherein the first optical component comprises a first optical axis;
- forming a first alignment aid element on the first substrate,
- wherein the first alignment aid element comprises a first surface,
- wherein the first surface is a first topmost surface,
- wherein the first surface is separated by a first distance with the first optical axis;
- forming a second alignment aid element on the first substrate,
- wherein the second alignment aid comprises a second surface not parallel to the first surface;
- forming a second optical component on a second substrate,
- wherein the second optical component comprises a second optical axis,
- wherein the second surface is configured to be separated with a third surface of the second optical component by a second distance less than an alignment tolerance between the first and second optical axes when the second optical component is aligned with the first optical component,
- wherein the second optical component comprises a fourth surface,
- wherein the fourth surface is a second topmost surface,
- wherein the fourth surface is separated by a third distance with the second optical axis,
- wherein the first distance is matched with the third distance in a way that enables an alignment of the first optical axis with the second optical axis;
- and
- assembling the second optical component on the first substrate so that the first surface is in contact with the second surface.
14 more elements
A method comprising
- forming a first optical component on a substrate,
- wherein the first optical component comprises a first optical axis,
- wherein the substrate is configured to accept a second optical component comprising a second optical axis;
- forming a first alignment aid element on the substrate,
- wherein the first alignment aid element comprises a first surface parallel to a lateral surface of the substrate,
- wherein the first surface is a first topmost surface,
- wherein the first surface is separated by a first distance with the first optical axis,
- wherein the second optical component comprising a second surface,
- wherein the second surface is a second topmost surface,
- wherein the second surface is separated by a second distance with the second optical axis,
- wherein the first distance is matched with the second distance in a way that enables an alignment of the first optical axis with the second optical axis when the second optical component is assembled on the substrate with the first topmost surface contacting with the second topmost surface;
- forming a second alignment aid element on the substrate,
- wherein the second alignment aid element comprises a third surface parallel to the lateral surface,
- wherein the third surface is in a vicinity of the first optical axis in a direction perpendicular to the lateral plane,
- wherein the second alignment aid element comprises a fiducial pattern comprising the third surface,
- wherein the fiducial pattern is configured for laterally aligning the second optical component with the substrate;
- and
- forming a third alignment aid element on the substrate,
- wherein the third alignment aid element comprises a fourth surface not parallel to the lateral surface,
- wherein the fourth surface is configured to be separated with a fifth surface of the second optical component by a distance less than an alignment tolerance between the first and second optical axes.
17 more elements
Dependencies are inferred from the claim text.