Microchannel sensor and method of manufacturing the same
AssigneeUniversität Hamburg
InventorsRobert Blick, Stefanie Haugg, Robert Zierold
Life of this patent
Estimating the term…
Abstract
A microchannel sensor for detecting radiation and/or particles, the microchannel sensor comprising at least one sensor substrate, wherein said sensor substrate comprises a plurality of channels extending from a first side of the substrate to an opposite side of the substrate, wherein said channels are arranged along a channel axis which is tilted relative a normal axis of said substrate, and wherein said plurality of channels comprise a first set of channels with a first cross section and a second set of channels with a second cross section being different from said first cross section.
Claims14
A microchannel sensor for detecting radiation and/or particles, the microchannel sensor comprising at least one sensor substrate, wherein said sensor substrate comprises a plurality of channels extending from a first side of the substrate to an opposite side of the substrate, wherein said channels are arranged along a channel axis which is tilted relative a normal axis of said substrate, and wherein said plurality of channels comprise a first set of channels with a first overall cross section size and a second set of channels with a second overall cross section size being different from said first overall cross section size,
- wherein at least one channel of the plurality of channels narrows between the first side of the substrate and the opposite side of the substrate.
Dependencies are inferred from the claim text.