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US 12,298,271 B2Granted
Chemical sensor with air via
AssigneeLife Technologies Corporation
InventorsJames Li, Jordan Owens, James Bustillo
Life of this patent
Estimating the term…
Abstract
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.
Claims21
A semiconductor device comprising:
- a sensor array formed in a substrate, each sensor including a liner layer deposited on a metal layer formed over the substrate;
- an air via oxide layer deposited on the substrate and over the liner layer and the metal layer;
- a microwell array coupled to the sensor array, the microwell array formed in a dielectric layer deposited over the air via oxide layer, each microwell presenting a microwell surface and formed through the dielectric layer to the air via oxide layer;
- an air via extending vertically through the air via oxide layer from a bottom of each microwell to an upper surface of each liner layer of each sensor in the sensor array, each air via presenting an air via surface, each air via having a shape with an upper opening near the bottom of the each microwell that is wider than a lower opening at the upper surface of the each liner layer, the upper opening having a width that is less than the width of the each microwell;
- and
- a conductive layer formed over the air via surface and at least partially over the microwell surface of each senor in the sensor array.
3 more elements
Dependencies are inferred from the claim text.