Method and system for determining the position of an element of an optical system in an assembly for processing or measuring an object, as well as the position of said object relative to said assembly, by parallel interferometric measurements

A method for determining a relative position of an element of an optical system of an assembly for processing or measuring an object along a predetermined measurement line associated with the optical system, the method comprising:

• generating a measurement beam of low coherence optical radiation, leading said measurement beam along said predetermined measurement line towards said element, and leading the measurement beam reflected or diffused by a back-reflective surface of said element on which said measurement beam impinges with at least a partial back-reflection, towards an optical interferometric sensor arrangement, wherein the measurement beam travels a measurement optical path from a respective source to said optical interferometric sensor arrangement including a first section between said source and said back-reflective surface of said element, and a second section between said back-reflective surface of said element and the interferometric sensor arrangement, having a respective predetermined nominal geometric length when said element is in a predetermined nominal position corresponding to a predetermined operating condition of said optical system, and comprises a main measurement beam which results from travel of a main measurement optical path with transmission through at least one optical element interposed upstream of said element along the predetermined measurement line and an additional multiplexed measurement beam resulting from travel of an additional measurement optical path having a geometric length different from the geometric length of said main measurement optical path;
• generating a reference beam of said low coherence optical radiation, and leading said reference beam towards said optical interferometric sensor arrangement, wherein the reference beam travels a reference optical path having an optical length equivalent to the optical length of the main measurement optical path in a nominal operating condition in which a position of said element is the predetermined nominal position;
• superimposing the measurement beam and the reference beam on a common region of incidence of said optical interferometric sensor arrangement, along a predetermined illumination axis;
• detecting along said predetermined illumination axis on said common region of incidence a position of a main pattern of interference fringes between the main measurement beam and the reference beam, wherein an extension of said main pattern of interference fringes along the predetermined illumination axis corresponds to a coherence length of said low coherence optical radiation, and of an additional pattern of interference fringes between the additional multiplexed measurement beam and the reference beam having (i) a peak or maximum of an intensity envelope of optical radiation different from the peak or maximum of an intensity envelope of optical radiation of the main pattern of interference fringes, or (ii) an intrinsic position of the intensity envelope of optical radiation offset from the intrinsic position of the intensity envelope of optical radiation of the main pattern of interference fringes, or (iii) a spatial frequency different from the spatial frequency of the main pattern of interference fringes, or detecting on said common region of incidence a frequency of a pattern of fringes in a wavelength spectrum, obtained from a main interference between the main measurement beam and the reference beam by wavelength dispersion of said main measurement and reference beams, an extension of which in a frequency domain is determined by the coherence length of said low coherence optical radiation, and of an additional pattern of interference fringes between the additional multiplexed measurement beam and the reference beam (i) having a frequency different from the frequency of the main pattern of interference fringes, or (ii) determined by superposition of the additional measurement and reference beams on an area of said common region of incidence different from an overlapping area of the main measurement and reference beams;
• and
• determining a difference in optical length between the measurement optical path or the additional measurement optical path and the reference optical path, indicative of a difference between (a) a current position of said element and (b) the predetermined nominal position of said element along an axis of the measurement beam, as a function respectively of the position of said pattern of interference fringes or of said additional pattern of interference fringes along said predetermined illumination axis of said common region of incidence, or of the frequency of said pattern of interference fringes or said additional pattern of interference fringes in the frequency domain.

A method for determining a position of a plurality of elements at least partially reflecting an optical radiation in a system including a plurality of optical components of a processing or measurement assembly, or including at least one optical element of a processing or measurement assembly and an object external thereto and subject to said processing or measurement, wherein said plurality of at least partially reflective elements is arranged along a predetermined common measurement line, the method comprising:

• generating a measurement beam of low-coherence optical radiation, leading said measurement beam along said predetermined common measurement line towards the plurality of at least partially reflective elements of the system, and leading the measurement beam reflected or diffused from a back-reflective surface of each element of the plurality of at least partially reflective elements on which said measurement beam impinges with at least a partial back-reflection, towards an optical interferometric sensor arrangement, wherein the measurement beam travels a measurement optical path from a respective source to said optical interferometric sensor arrangement including a first section between said source and said back-reflective surface of each element of the plurality of at least partially reflective elements, and a second section between said back-reflective surface of each element of the plurality of at least partially reflective elements and the interferometric sensor arrangement, having a respective predetermined nominal geometric length when each element of the plurality of at least partially reflective elements is in a respective predetermined nominal position corresponding to a predetermined operating condition of said system, and comprises a first measurement beam which results from travel of a first measurement optical path with reflection from a first element along the predetermined common measurement line and a second multiplexed measurement beam which results from travel of a second measurement optical path with reflection from a second element along the predetermined common measurement line, having a geometric length different from the geometric length of said first measurement optical path;
• generating a reference beam of said low coherence optical radiation, and leading said reference beam towards said optical interferometric sensor arrangement, wherein the reference beam comprises a first reference beam which results from travel of a first reference optical path having an optical length equivalent to the optical length of the first measurement optical path in a nominal operating condition in which a position of said first element is the respective predetermined nominal position, and a second multiplexed reference beam which results from travel of a second reference optical path having a geometric length different from the geometric length of said first reference optical path in an operating condition in which the position of said second element is the respective predetermined nominal position;
• superimposing the first and second multiplexed measurement beams respectively on the first and second multiplexed reference beams on a common region of incidence of said optical interferometric sensor arrangement, along a predetermined illumination axis;
• detecting along said predetermined illumination axis on said common region of incidence a position of a first pattern of interference fringes between the first measurement beam and the first reference beam, wherein an extension of said pattern of interference fringes along the predetermined illumination axis corresponds to a coherence length of said low coherence optical radiation, and of a second pattern of interference fringes between the second multiplexed measurement beam and the second multiplexed reference beam having (i) a peak or maximum of an intensity envelope of optical radiation different from the peak or maximum of an intensity envelope of optical radiation of the first pattern of interference fringes, or (ii) an intrinsic position of the intensity envelope of optical radiation offset from the intrinsic position of the intensity envelope of optical radiation of the first pattern of interference fringes, or (iii) a spatial frequency different from the spatial frequency of the first pattern of interference fringes, or
• detecting on said common region of incidence a frequency of a first pattern of fringes in a wavelength spectrum, obtained by interference between the first measurement beam and the first reference beam by wavelength dispersion of said first measurement and first reference beams, whose extension in a frequency domain is determined by the coherence length of said low coherence optical radiation, and of a second pattern of interference fringes between the second multiplexed measurement beam and the second multiplexed reference beam (i) having a frequency different from the frequency of the first pattern of interference fringes, or (ii) determined by superposition of the first measurement and first reference beams on an area of said common region of incidence different from an overlapping area of the first measurement and first reference beams;
• and
• determining:
• (i) a difference in optical length between the first measurement optical path and the first reference optical path, indicative of a difference between (a) a current position of said first element and (b) the predetermined nominal position of said first element along an axis of the measurement beam, as a function respectively of the position of said first pattern of interference fringes along said predetermined illumination axis of said common region of incidence, or of the frequency of said first pattern of interference fringes in the frequency domain;
• and
• (ii) a difference in optical length between the second measurement optical path and the second reference optical path, indicative of a difference between (a) the current position of said second element and (b) the predetermined nominal position of said second element along the axis of the measurement beam, as a function respectively of the position of said second pattern of interference fringes along said predetermined illumination axis of said common region of incidence, or of the frequency of said second pattern of interference fringes in the frequency domain.