Gas cylinder automation system

A gas cylinder automation system comprising:

• a gas cylinder delivery system including a plurality of mobile robots configured to automatically supply gas cylinders along a transfer path from one of a gas cylinder storage queue or gas storage cabinet of the gas cylinder automation system to a semiconductor process line;
• and
• a cylinder-type sensor configured to check whether the transfer path is abnormal by moving along the transfer path by one of the plurality of mobile robots,
• wherein the cylinder-type sensor includes:
• a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and the cylinder head having a first detecting sensor on the end cap fastening member, the first detecting sensor being configured to detect a torque applied to the end cap;
• and
• a cylinder body connected to the cylinder head and having a second detecting sensor on the cylinder body, the second detecting sensor including one of an acceleration sensor or an inclination sensor.