Glass, glass-ceramic and ceramic articles with graded protective coatings having hardness and strength

An article, comprising:

• a substrate comprising a glass, glass-ceramic or ceramic composition and comprising a primary surface;
• and
• a protective film disposed on the primary surface of the substrate,
• wherein the protective film comprises a metal oxynitride comprising a graded region that is graded such that an oxygen concentration in the film varies by 1.3 or more atomic %,
• wherein the protective film further comprises a non-graded region, wherein the graded region is bounded by the primary surface of the substrate and the non-graded region,
• wherein the oxygen concentration in the graded region decreases from the primary surface of the substrate to the non-graded region, and
• wherein the protective film comprises a crack onset strain (COS) failure level of 0.5% or greater.