Hybrid glass plastic flow cell and fabrication methods
AssigneeIllumina, Inc.
InventorsJonathan Ziebarth, Jon Aday, Paul Crivelli, Gerald Kreindl, Amit Sharma
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Abstract
Provided herein include various examples of a method for manufacturing aspects of flow cell. The method may include performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned, singulating the wafer into individual dies, orienting each die on a temporary substrate, where the orienting creates spaces between each individual die, and molding a material over the spaces to create a hybrid wafer comprised of glass and molded material. The method may also include bonding two of the hybrid wafers together, forming a bonded wafer stack.
Claims11
A method comprising:
- for each patterned wafer of at least two patterned wafers:
- performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned wafer to add specific chemical functionality to the surface;
- singulating the wafer into individual dies, wherein each individual die comprises an active area of a given flow cell;
- orienting each die on a temporary substrate, wherein the orienting creates spaces between each individual die;
- and
- molding a material over the spaces such that a top surface of the molded material is contiguous with a portion of the top surface of each active area to create a hybrid wafer comprised of glass and molded material;
- and
- bonding a first hybrid wafer formed from a first patterned wafer of the at least two patterned wafers to a second hybrid wafer formed from a second patterned wafer of the at least two patterned wafers, wherein the bonding couples the top surface of the molded material of the first hybrid wafer to the top surface of the molded material of the second hybrid wafer, forming a bonded wafer stack.
Dependencies are inferred from the claim text.