Photosensor, sensor unit, and object detection apparatus using photosensor
AssigneeNational Institute for Materials Science
InventorsTadaaki Nagao, Duy Thang Dao
Life of this patent
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Abstract
A photothermal converter using a wavelength selective perfect absorber made of a low-loss metal material or dielectric and a heat detection sensor are combined to develop a sensor that efficiently converts light of a specific wavelength into heat and further electrically detects the heat. Here, since the wavelength selective perfect absorber of the present invention has a periodic structure, it has high directivity, and can also be used as a small motion sensor or a watching sensor using detection of thermal radiation. In addition, it can also be used as a high-precision small position sensor by being combined with a laser light source matching the resonance wavelength of the sensor.
Claims19
A photosensor which is a sensor capable of detecting light, the photosensor comprising:
- an absorber having an entire surface formed of only one of a metal and a dielectric and configured to absorb incident light;
- and
- means for detecting heat generated by absorption of light by the absorber, wherein the absorber absorbs light that is perpendicularly incident on a surface of the absorber and has a same wavelength as a resonance wavelength of the absorber,
- the surface of the absorber includes a plurality of raised portions that are raised,
- the surface of the absorber has a periodic structure in which the plurality of raised portions are arranged at a predetermined period such that a one-dimensional or two-dimensional lattice pattern is formed,
- in the one-dimensional lattice pattern,
- each of the plurality of raised portions is formed in an elongated manner and is arranged at a first period along a predetermined direction so as to be parallel to each other,
- widths of the raised portions are 0.3 to 0.7 times the first period,
- thicknesses of the raised portions are 0.05 to 0.2 times the first period,
- in the two-dimensional lattice pattern,
- each of the plurality of raised portions is arranged at a second period so as to be set out in a grid,
- widths of the raised portions are 0.3 to 0.7 times the second period,
- thicknesses of the raised portions are 0.05 to 0.2 times the second period, and
- each of a plurality of modes of surface plasmon polaritons or surface phonon polaritons excited by a surface parallel component of light incident on the absorber and a momentum obtained from the lattice pattern and propagating over the surface of the absorber is in a degenerate state when the light incident on the absorber is incident perpendicularly to the surface and a wavelength is the resonance wavelength.
Dependencies are inferred from the claim text.